SOBIROVA , Tursunoy. FROM EXPERIMENTAL RESEARCH METHODS: ADVANTAGES AND DISADVANTAGES OF THE MAGNETRON SPUTTERING METHOD. Innovation Science and Technology, [S. l.], v. 2, n. 4, 2026. DOI: 10.5281/zenodo.20018921. Disponível em: https://ist-journal.uz/index.php/IST/article/view/786. Acesso em: 24 may. 2026.